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Swagelokサーマル・イマージョン・ダイヤフラム・バルブ DHシリーズ

Swagelok® Thermal-Immersion Diaphragm Valves (DH Series)

Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance in high-temperature processes.

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The DH series thermal-immersion diaphragm valve is designed for applications where the valve needs to be entirely contained within a high-temperature, high-purity environment such as atomic layer deposition (ALD) and precursor delivery applications. Its fully contained high-purity grade PFA seat provides a broad range of chemical compatibility and excellent resistance to swelling and contamination. The fully swept flow path in the body minimizes entrapment areas and maximizes flow capacity.

Flow coefficients up to 0.60, a variety of 1/4 and 3/8 in. end connections, and pneumatically and manually actuated models—with the normally closed actuator capable of a valve opening or closing time of less than 5 ms—are available to meet a wide range of system needs. The valve is designed for optimal performance at 220°C (428°F).


Working PressureVacuum to 70 psig (4.8 bar)
Burst Pressure> 3200 psig (220 bar)
Actuation Pressure60 to 90 psig (4.1 to 6.2 bar)
Temperature20° to 220°C (70° to 428°F)
Flow Coefficient
"H" type VCR® Connections0.60 at 20°C (70°F)
0.40 at 220°C (428°F)
VCR and all other connections 0.30 at 20°C (70°F)
0.21 at 220°C (428°F)
Modular surface-mount body 0.25 at 20°C (70°F)
0.21 at 220°C (428°F)
Body Material316L VIM-VAR stainless steel
Diaphragm MaterialCobalt-based superalloy
End Connections
TypeVCR and "H" type VCR metal gasket face seal fittings, tube butt weld; modular surface mount (MSM)
Size 1/4 and 3/8 in.
1.125 and 1.5 in. MSM

DH Series Thermal-Immersion Diaphragm Valves Catalogs

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