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Swagelok DH Series Thermal-Immersion Diaphragm Valves

Swagelok® Thermal-Immersion Diaphragm Valves (DH Series)

Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance in high-temperature processes.

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The DH series thermal-immersion diaphragm valve is designed for applications where the valve needs to be entirely contained within a high-temperature, high-purity environment such as atomic layer deposition (ALD) and precursor delivery applications. Its fully contained high-purity grade PFA seat provides a broad range of chemical compatibility and excellent resistance to swelling and contamination. The fully swept flow path in the body minimizes entrapment areas and maximizes flow capacity.

Flow coefficients up to 0.60, a variety of 1/4 and 3/8 in. end connections, and pneumatically and manually actuated models—with the normally closed actuator capable of a valve opening or closing time of less than 5 ms—are available to meet a wide range of system needs. The valve is designed for optimal performance at 220°C (428°F).


Working Pressure Vacuum to 70 psig (4.8 bar)
Burst Pressure > 3200 psig (220 bar)
Actuation Pressure 60 to 90 psig (4.1 to 6.2 bar)
Temperature 20° to 220°C (70° to 428°F)
Flow Coefficient
"H" type VCR® Connections 0.60 at 20°C (70°F)
0.40 at 220°C (428°F)
VCR and all other connections 0.30 at 20°C (70°F)
0.21 at 220°C (428°F)
Modular surface-mount body 0.25 at 20°C (70°F)
0.21 at 220°C (428°F)
Body Material 316L VIM-VAR stainless steel
Diaphragm Material Cobalt-based superalloy
End Connections
Type VCR and "H" type VCR metal gasket face seal fittings, tube butt weld; modular surface mount (MSM)
Size 1/4 and 3/8 in.
1.125 and 1.5 in. MSM

DH Series Thermal-Immersion Diaphragm Valves Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

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