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pressure gauges ultrahigh-purity and clean dry air

Swagelok® Pressure Gauges, Ultrahigh-Purity and Clean Dry Air

Swagelok ultrahigh-purity and clean dry air pressure gauges feature a Bourdon tube to monitor positive system pressure and vacuum.

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PGU 系列和 PGC 系列压力表设计用于从大宗气体分配到工艺工具应用等广泛的应用。它们的精度符合 ASME B40.1 标准,表盘尺寸可提供 50 mm (2 in.),量程 ±2% / 1% / 2%(ASME B40.1,A 级,EN 837-1 2.5 类,JIS B7505 2.5 类),以及 40 mm (1 1/2 in.),量程± 3% / 2% / 3%(ASME B40.1,B 级,EN 837-1 4 类,JIS B7505 4 类)。

根据 SEMI/SEMATECH 标准,PGU 系列压力表是用于半导体气体应用的UHP“清洁”产品,在 100/10 级清洁室中进行清洗和包装,并具有 316L VAR 端接。

PGC 系列压力表在 100 级清洁室中组装、清洁和包装,具有 1/4 in. NPT 端接。

规格

度盘量程 PGU 系列: 真空至 3000 psi;200 bar;21 MPa
PGC 系列: 真空至 6000 psi;400 bar;40 MPa
度盘尺寸 40 和 50 mm(1 1/2 和 2 in.)
精度 依照 ASME B40.100、EN837-1 和 JIS B7505
温度范围
环境温度 –40 至 140° F(–40 至 60° C)
介质 –40 至 212° F(–40 至 100° C)
端接
PGU 系列 1/4 in 内螺纹 VCR®、1/4 in. 可旋转外螺纹 VCR、1/4 in. 整体式外螺纹 VCR、1.5 in. 流通式表面安装
PGC 系列 1/4 in. 外螺纹 NPT
测试和校准 每个超高纯和清洁干燥空气压力表都经过 100% 的出厂校准和氦气泄漏测试,最大速率为 1× 10-9 std cm3/s。

压力表目录

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