Swagelok® Diaphragm-Sealed Valves
Swagelok diaphragm-sealed valves improve system efficiency while providing effective flow shutoff by minimizing entrapment areas and facilitating purging with a fully swept flow path. They have long cycle lives and are available in a variety of sizes, materials, and configurations to meet the system requirements of high-purity and ultrahigh-purity (UHP) applications.
View Diaphragm ValvesSwagelok diaphragm-sealed valves come in various sizes, materials, and configurations to meet the needs of high-purity and UHP applications. They feature flow coefficients ranging from 0.20 to 13. Their fully swept flow paths and corrosion-resistant construction make them ideal for applications where cleanliness is crucial. Users can choose from manual, pneumatic, and locking actuator options.
Swagelok diaphragm-sealed valves can be used in atomic layer deposition (ALD), high-flow, modular gas system, thermal-immersion, and ultrahigh-purity applications requiring fluoropolymer component construction.
- Swagelok springless diaphragm valves for modular gas systems are easy to install, provide a visual indication of flow direction, and have a seat design that improves thermal stability
- Swagelok bulk gas diaphragm valves offer a combination of strength, flexibility, and cycle life to support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications
- Swagelok thermal-immersion diaphragm valves can be entirely contained within a high-temperature, high-purity environment, making them strong options for ALD and precursor delivery applications
- Swagelok ultrahigh-purity fluoropolymer diaphragm valves offer a strong solution for UHP chemical distribution, DI water, and bulk chemical delivery systems
Have questions about diaphragm-sealed valves?
Diaphragm-Sealed Valves Categories
Bulk-Gas Diaphragm Valves, LD Series
High-flow application bulk-gas distribution diaphragm, designed to meet ultrahigh-purity shutoff, bulk-gas distribution, and isolation application needs.
High-Purity High-Pressure Diaphragm Valves, DL and DS Series
Discover high-purity, high-pressure diaphragm valves with repetitive shutoff with a fully contained softseat stem tip, standard bottom, and panel mounting.
Multi-Valve Manifolds
Find multi-valve manifolds with diaphragm-sealed valves. Designed for reliable performance, these manifolds offer high purity and precise fluid control.
Spare Parts and Accessories
Browse quality valve maintenance components for diaphragm-sealed valve spare parts and accessories, including diaphragm and seal kits, stem kits, and actuator kits.
Springless Diaphragm Valves for Modular Gas Systems, 1.125 in, DE Series
Reliable and enhanced control valves with a springless design are ideal for efficient operation in modular gas systems.
Thermal-Immersion Diaphragm Valves, DH Series
Thermal-immersion diaphragm valves are used in high-temperature processes such as atomic-layer deposition (ALD) and precursor delivery applications.
Ultrahigh-Purity Fluoropolymer Diaphragm Valves, DRP Series
Ensure optimal performance and longevity in UHP chemical systems with a fully swept flow path to minimize stress and fluid contamination.
Ultrahigh-Purity High-Flow Diaphragm Valves, DF Series
Increase cycle life with high-flow, springless diaphragm valves. No springs or threads improve cleanliness and fully swept flow path enhances purging.
Ultrahigh-Purity High-Pressure Diaphragm Valves, DPH Series
Ultrahigh-purity, high-pressure diaphragm valves are available in a variety of sizes, materials, and configurations for various applications.
Ultrahigh-Purity Shutoff Diaphragm Valves, DP Series
View ultrahigh-purity shutoff diaphragm valves with straight pattern and manual actuation, multiport and modular surface mount (MSM) with integrated actuators.
Diaphragm-Sealed Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Features: 1.125 in. C-seal and W-seal designs; Available in two- and three-port configurations; Compact pneumatic and manual actuators; Pneumatic actuator indicator ball: red for normally closed, green for normally open; Fixed orientation of actuator to body for consistency of installation; Corner chamfers on outlet side of body for visual indication of flow direction
Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance at 220 degrees C (428 degrees F) for high-temperature processes.
气动和四分之一圈手动 2 通和 3 通型；带有流量可调和旁通 功能的气动型和手动型 DuPont® Teflon® 改进型 PTFE 润湿部件和聚丙烯执行机构 符合针对超高纯系统组件的 SEMI 标准 F57-0301 细牙螺纹扩口和 Nippon Pillar® Super 300 端接标准; 可提供 Flowell, 空间节约型和其它端接 可提供定制阀组和组件
工作压力高达 300 psig (20.6 bar); 开关、散装气体分配以及隔离服务; 铸造、锻造及棒材不锈钢阀体材料; 1/4 至 1 in.，12 至 25 mm 端接.
316L VAR 不锈钢阀体; 工作压力可达 300 psig (20.6 bar); 1/4、3/8 和 1/2 in.；10 和 12 mm 端接
Calculate Flow Rate for the Right Valve Selection
Use our valve flow coefficient (Cv) calculator to chose a valve sized correctly for your needs.
Use the ToolSwagelok Resources Curated for You
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1つの新しいバルブが半導体製造を変える3つの理由
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