Swagelok^® Atomic Layer Deposition (ALD) Valves

Swagelok ultrahigh-purity atomic layer deposition (ALD) valves offer the ultrahigh cycle life, high-speed actuation, flow rates, thermal immersibility, and extreme cleanliness needed to enable precise dosing and maximize chip yield in advanced semiconductor manufacturing applications.

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Since introducing the world to ALD valves, we have worked closely with semiconductor tool OEMs and fabs to deliver advanced ALD valve technology that provides the extreme levels of precision, consistency, cleanliness, and high cycle life necessary to keep up with the quick pace of innovation in the marketplace. Swagelok^® ALD valves can support increased chip production efficiency and overcome the challenges that are often associated with ALD processes.

Our ALD ultrahigh-purity valves feature:

Ultrahigh cycle life with high-speed actuation
C_v ranging from 0.27 to 1.7
Temperature capability up to 392°F (200°C) for specified models
Electronic or optical actuator position-sensing option
Cleanliness suitability for ultrahigh-purity applications
Modular surface mount, tube butt weld, and VCR^® end connections

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Atomic Layer Deposition (ALD) Valve Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

Ultrahigh-Purity Valves for Atomic Layer Processing, ALD, Diaphragm and Bellows Valves

ALD 3, 6, and 7 Diaphragm Valves and ALD20 Bellows: Ultrahigh cycle life, high-speed actuation; Up to 392°F (200°C) w thermal actuators; Electronic actuator position-sensing; ultrahigh-purity applications; High flow capacity, PFA seat, Normally closed pneumatic actuation, Alloy 22 available

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