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原子层沉积 (ALD) 阀

世伟洛克® 原子层沉积 (ALD) 阀

世伟洛克超高纯原子层沉积 (ALD) 阀具有超高循环寿命、高速执行、流量、热浸没和超高洁净度，可在先进半导体制造应用中实现精确进料并尽可能地提高芯片产量。

索取 ALD 阀门信息

ALD 阀门问世以来，我们一直与半导体工具 OEM 和晶圆厂密切合作，提供的先进 ALD 阀门技术具有超高的精度、一致性、洁净度和高循环寿命，是紧跟市场快速创新步伐所必需的。世伟洛克® ALD 阀门可支持芯片生产效率的提高，并克服 ALD 工艺通常面临的挑战。

我们的 ALD 超高纯阀具有以下特点：

  • 快速动作下的超高循环寿命
  • Cv 范围从 0.27 至 1.7
  • 指定型号的承温能力高达 392°F (200°C)
  • 电子或光学执行机构位置传感选购件
  • 洁净度适合超高纯应用
  • 模块化表面安装、卡套管对焊和 VCR® 端接

了解 ALD 阀门如何应对挑战

原子层沉积 (ALD) 阀类别

超高纯度隔膜阀，ALD3 和 ALD6 系列

超高纯度隔膜阀，ALD3 和 ALD6 系列

ALD3 和 ALD6 隔膜阀在原子层沉积应用中具备强大的性能，可实现高速执行下的超高循环寿命。
超高纯度隔膜阀，ALD7 系列

超高纯度隔膜阀，ALD7 系列

世伟洛克® ALD7 超高纯隔膜阀提供了在半导体制造应用中尽可能地提高芯片成品率所需的精度和一致性。
高流量应用型超高纯度阀，ALD20 系列

高流量应用型超高纯度阀，ALD20 系列

使用 ALD20 超高纯阀门推进原子层沉积技术，其流速是其他 ALD 阀门的 2-3 倍。

Atomic Layer Deposition (ALD) Valve Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

隔膜阀：原子层沉积用ALD

原子层沉积 (ALD) 隔膜阀，高速执行下的超高循环寿命 ，Cv 0.27 到 0.62，耐热执行器, 耐温高达 200°C（392°F），电子执行器位置传感选购件，合采用 316L VIM-VAR 不锈钢阀体的超高纯应用场合，VCR®, 卡套管对焊和模块化表面安装端接

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Cleanroom assembly of a Swagelok ALD20 UHP valve for semiconductor industry use

One New Valve: Three Reasons It Could Change Semiconductor Manufacturing

Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.

Unlock More of the Periodic Table

Swagelok Resources Curated for You

Swagelok fluid system components are available in materials designed to last in semiconductor manufacturing environments.
Improve Semiconductor Yield with Optimized Alloys

Discover how semiconductor fabricators can improve end-to-end production yields and improve long-term profitability by selecting the right metals for critical fluid system components.

Carl White, who has spent nearly 40 years working at various points in the semiconductor industry supply chain, offers a firsthand perspective on the past, present, and future of semiconductor industry advancement.
Q&A: Semiconductor Manufacturing Past, Present, and Future

Find out how collaboration between semiconductor tool OEMs, microchip manufacturers, and fluid system solutions providers has enabled the semiconductor market to keep up with the demands of Moore’s Law for decades, and where we go from here.

Rosendahl Nextrom and Swagelok collaborating to maximize operational efficiency
Fiber Optics Equipment Manufacturer Increases Efficiency with Customized Solutions

Since the 1980s, Rosendahl Nextrom has depended on Swagelok to move its business forward. Learn more about the solutions that allowed the company to outpace its competitors and remain an industry leader.

Dilution refrigerator manufacturer Bluefors trusts Swagelok for fluid system components and solutions.
Reliable Fluid System Solutions for the Scientific Frontier

Learn why Finnish dilution refrigerator manufacturer Bluefors trusts Swagelok for fluid system components and solutions that help enable quantum computing, experimental physics, and more.

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