Swagelok^® Ultrahigh-Purity Valves for High-Flow Atomic Layer Processing Applications (ALD20 Series)

Swagelok ALD20 ultrahigh-purity valves offer a high flow capacity ideal for atomic layer deposition processes that require low-vapor pressure precursor gases.

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The high-flow Swagelok^® ALD20 ultrahigh-purity valve provides the reliability and performance expected of Swagelok^® ALD valves while also enabling previously unattainable temperature stability and flow possibilities. It enables manufacturers to experiment with different processes and low-vapor pressure chemistries to achieve the uniform gas deposition needed to develop advanced technology without significantly changing processes.

The Swagelok ALD20 valve can:

Deliver a of 1.2 C_v flow rate in the same footprint (1.5 in.) as existing ALD valves, offering improved performance without requiring retooling
Provide an even greater 1.7 C_v with a slightly larger (1.75 in.) standard variant—the highest flow rate currently available from an ultrahigh-cycle life, ultrahigh-purity valve
Be immersed in a gas box from 50°F (10°C) up to 392°F (200°C), eliminating the need to isolate the actuator during heating and improving deposition consistency
Provide enhanced corrosion resistance with 316L VIM-VAR stainless steel or Alloy 22 body material options
Support clean operation over the course of an ultrahigh cycle life for process integrity thanks to a highly polished bellows with a 5 μin. R_a finish
Deliver high-speed (<10ms) repeatable actuation for precise, consistent flow to meet dosing requirements

Custom-set flow coefficients are also available.

Learn How The ALD20 Valve Helps Overcome Semiconductor Processing Hurdles

ALD20 Valve Specifications

Working Pressure	Vacuum to 20 psig (1.4 bar)
Burst Pressure	>3200 psig (220 bar)
Actuation Pressure	70 to 90 psig (4.9 to 6.2 bar)
Temperature	50° to 392°F (10° to 200°C)
Flow Coefficient (C_v)	1.2 (MSM) or 1.7 (straight pattern)
Body Materials	316L VIM-VAR or Alloy 22
Bellows Material	Alloy 22 (5 μin. R_a finished)
End Connections	Type (Size): Female VCR^® fitting (1/2 in.), rotatable male VCR fitting (1/2 in.), tube butt weld, 0.50 in. long (1/2 in. x 0.049 in.), modular surface-mount high-flow C-seal (1.5 in.)