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원자층 증착(ALD) 밸브

Swagelok® 원자층 증착(ALD) 밸브

Swagelok 초고순도 원자층 증착(ALD) 밸브는 첨단 반도체 제조 애플리케이션에서 정밀한 투입량을 보장하고 칩 수율을 극대화하는 데 필요한 극도로 높은 사이클 수명, 고속 작동, 유량, 고온 봉입성(thermal immersibility), 극한의 청정도를 제공합니다.

ALD 밸브 정보 요청

Swagelok은 세계에 ALD 밸브를 선보인 이래로, 반도체 도구 장비사 및 제조업체와 면밀한 협력을 통해 시장의 빠른 혁신 속도에 대응하는 데 필요한 극한 수준의 정밀도, 일관성, 청정도, 높은 사이클 수명을 제공하는 첨단 ALD 밸브 기술을 공급하고 있습니다. Swagelok® ALD 밸브는 높은 칩 생산 효율을 지원하며, 일반적으로 ALD 공정과 관련된 문제를 극복할 수 있습니다.

Swagelok ALD 초고순도 밸브의 특징:

  • 고속 작동과 극도로 높은 사이클 수명
  • 0.27~1.7의 Cv 범위
  • 특정 모델의 경우 최고 200°C(392°F)의 온도 지원
  • 전자식 또는 광학식 액추에이터 위치 감지 옵션
  • 초고순도 애플리케이션에 적합한 청정도
  • 모듈 조립형, 튜브 맞대기 용접, VCR® 연결구

ALD 밸브로 어떻게 과제를 해결할 수 있는지 알아보기

原子层沉积 (ALD) 阀类别

超高纯度隔膜阀,ALD3 和 ALD6 系列

超高纯度隔膜阀,ALD3 和 ALD6 系列

ALD3 和 ALD6 隔膜阀在原子层沉积应用中具备强大的性能,可实现高速执行下的超高循环寿命。
超高纯度隔膜阀,ALD7 系列

超高纯度隔膜阀,ALD7 系列

世伟洛克® ALD7 超高纯隔膜阀提供了在半导体制造应用中尽可能地提高芯片成品率所需的精度和一致性。

高流量应用型超高纯度阀,ALD20 系列

高流量应用型超高纯度阀,ALD20 系列

使用 ALD20 超高纯阀门推进原子层沉积技术,其流速是其他 ALD 阀门的 2-3 倍。

Atomic Layer Deposition (ALD) Valve Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

Cleanroom assembly of a Swagelok ALD20 UHP valve for semiconductor industry use

One New Valve: Three Reasons It Could Change Semiconductor Manufacturing

Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.

Unlock More of the Periodic Table

Swagelok Resources Curated for You

Swagelok fluid system components are available in materials designed to last in semiconductor manufacturing environments.
Improve Semiconductor Yield with Optimized Alloys

Discover how semiconductor fabricators can improve end-to-end production yields and improve long-term profitability by selecting the right metals for critical fluid system components.

Carl White, who has spent nearly 40 years working at various points in the semiconductor industry supply chain, offers a firsthand perspective on the past, present, and future of semiconductor industry advancement.
Q&A: Semiconductor Manufacturing Past, Present, and Future

Find out how collaboration between semiconductor tool OEMs, microchip manufacturers, and fluid system solutions providers has enabled the semiconductor market to keep up with the demands of Moore’s Law for decades, and where we go from here.

Rosendahl Nextrom and Swagelok collaborating to maximize operational efficiency
Fiber Optics Equipment Manufacturer Increases Efficiency with Customized Solutions

Since the 1980s, Rosendahl Nextrom has depended on Swagelok to move its business forward. Learn more about the solutions that allowed the company to outpace its competitors and remain an industry leader.

Dilution refrigerator manufacturer Bluefors trusts Swagelok for fluid system components and solutions.
Reliable Fluid System Solutions for the Scientific Frontier

Learn why Finnish dilution refrigerator manufacturer Bluefors trusts Swagelok for fluid system components and solutions that help enable quantum computing, experimental physics, and more.

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