世伟洛克® DH 系列热浸没型隔膜阀是为那些需要将阀门完全封闭在高温、高纯环境中的应用而设计的,如原子层沉积 (ALD) 和前躯体输送应用。这些阀门具有完全包覆的高纯度 PFA 阀座,可与多种化学品相容,并具有优异的抗膨胀和抗污染能力。阀体可完全清扫流道,尽可能地减小了截留区,增强流动能力。
流量系数高达 0.60,提供各种 1/4 和 3/8 in. 端接,以及气动和手动驱动型号,可满足各种系统需求。“常闭”是指执行机构能够在 5 ms 以内完成阀门的开启或关闭,该阀门的设计可在 220°C (428°F) 温度条件下实现理想性能。
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Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance at 220 degrees C (428 degrees F) for high-temperature processes.
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