Swagelok^® Diaphragm-Sealed Valves

Swagelok diaphragm-sealed valves improve system efficiency while providing effective flow shutoff by minimizing entrapment areas and facilitating purging with a fully swept flow path. They have long cycle lives and are available in a variety of sizes, materials, and configurations to meet the system requirements of high-purity and ultrahigh-purity (UHP) applications.

View Diaphragm Valves

Swagelok diaphragm-sealed valves come in various sizes, materials, and configurations to meet the needs of high-purity and UHP applications. They feature flow coefficients ranging from 0.20 to 13. Their fully swept flow paths and corrosion-resistant construction make them ideal for applications where cleanliness is crucial. Users can choose from manual, pneumatic, and locking actuator options.

Swagelok diaphragm-sealed valves can be used in atomic layer deposition (ALD), high-flow, modular gas system, thermal-immersion, and ultrahigh-purity applications requiring fluoropolymer component construction.

Swagelok springless diaphragm valves for modular gas systems are easy to install, provide a visual indication of flow direction, and have a seat design that improves thermal stability
Swagelok bulk gas diaphragm valves offer a combination of strength, flexibility, and cycle life to support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications
Swagelok thermal-immersion diaphragm valves can be entirely contained within a high-temperature, high-purity environment, making them strong options for ALD and precursor delivery applications
Swagelok ultrahigh-purity fluoropolymer diaphragm valves offer a strong solution for UHP chemical distribution, DI water, and bulk chemical delivery systems

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Diaphragm-Sealed Valves Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

Springless Diaphragm Valves 1.125 in for Modular Gas Systems, DE Series

Features: 1.125 in. C-seal and W-seal designs; Available in two- and three-port configurations; Compact pneumatic and manual actuators; Pneumatic actuator indicator ball: red for normally closed, green for normally open; Fixed orientation of actuator to body for consistency of installation; Corner chamfers on outlet side of body for visual indication of flow direction

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Thermal-Immersion Diaphragm Valves DH Series

Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance at 220 degrees C (428 degrees F) for high-temperature processes.

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超高纯含氟聚合物隔膜阀：DRP系列

气动和四分之一圈手动 2 通和 3 通型；带有流量可调和旁通功能的气动型和手动型 DuPont® Teflon® 改进型 PTFE 润湿部件和聚丙烯执行机构符合针对超高纯系统组件的 SEMI 标准 F57-0301 细牙螺纹扩口和 Nippon Pillar® Super 300 端接标准; 可提供 Flowell, 空间节约型和其它端接可提供定制阀组和组件

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隔膜阀：DL和DS系列

无填料，全金属壳体; 压力从真空至 3500 psig (241 bar); 温度从 –100 至 250°F (–73 至 121°C).

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无弹簧隔膜阀, 高性能

DP 系列适合超高纯度应用 316L VIM-VAR 不锈钢阀体低压和高压两种阀型VCR®，卡套管对焊和模块化表面安装端接手动或气动执行机构。

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隔膜阀 LD系列

工作压力高达 300 psig (20.6 bar); 开关、散装气体分配以及隔离服务; 铸造、锻造及棒材不锈钢阀体材料; 1/4 至 1 in.，12 至 25 mm 端接.

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高流量、无弹簧隔膜阀 DF系列

316L VAR 不锈钢阀体; 工作压力可达 300 psig (20.6 bar); 1/4、3/8 和 1/2 in.；10 和 12 mm 端接