Swagelok® Ultrahigh-Purity Fluoropolymer Diaphragm Valves (DRP Series)
Swagelok DRP series ultrahigh-purity (UHP) fluoropolymer diaphragm valves offer a strong solution for UHP chemical distribution, deionized (DI) water, and bulk chemical delivery systems.
Request Additional DetailsSwagelok® DRP series valves are designed with modified PTFE wetted parts for superior chemical resistance. A patented fluid flow path reduces fluid entrapment, allowing for quick purging of process fluids and minimizing the risk of contamination. The design also limits fluid shear, preventing slurry agglomeration and improving process efficiency.
The modified PTFE diaphragm is optimized for durability and long cycle life, with a patented shape that reduces stress during operation. A reinforced diaphragm rim seals the valve cavity, preventing process fluid contamination and reducing seat strain.
DRP series diaphragm valves are available with either pneumatic or manual actuation and adjustable flow and bypass options for precise control. They meet SEMI Standard F57-0301, making them perfect for ultrahigh-purity (UHP) applications like chemical mechanical planarization (CMP) slurry systems, DI water systems, and bulk chemical delivery systems.
Specifications
| Pressure Rating | Up to 100 psig (6.8 bar) |
| Media Temperature | 73° to 212°F (23° to 100°C) |
| Flow Coefficient | Up to 10.2 |
| Body, Diaphragm Material | Modified PTFE |
| End Connections | Type: Fine thread flare and Nippon Pillar Super 300® standard Size: 1/4 to 1 1/4 in. and 6 to 25 mm Configuration: two- and three-way manual and pneumatic shutoff; adjustable flow and bypass models |
Want to optimize your ultrahigh-purity fluid system with the DRP series valve?
UHP Fluoropolymer Diaphragm Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
气动和四分之一圈手动 2 通和 3 通型；带有流量可调和旁通 功能的气动型和手动型 DuPont® Teflon® 改进型 PTFE 润湿部件和聚丙烯执行机构 符合针对超高纯系统组件的 SEMI 标准 F57-0301 细牙螺纹扩口和 Nippon Pillar® Super 300 端接标准; 可提供 Flowell, 空间节约型和其它端接 可提供定制阀组和组件
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