Swagelok® Ultrahigh-Purity Diaphragm Valves for Atomic Layer Processing (ALD7A Series)
Swagelok ALD7A ultrahigh-purity valves provide the flow consistency and capacity, actuator speed, temperature rating, and cleanliness necessary to help maximize chip throughput in new or existing semiconductor manufacturing tools.
Request ALD7A Valve InformationBuilding on the proven ALD7 valves, the Swagelok® ALD7A ultrahigh-purity diaphragm valve has been enhanced with field flow adjustability, enabling precise tuning of flow performance directly within the tool environment. ALD7A valves are purpose-built to deliver precise, repeatable flow and actuation performance across demanding cycling conditions, and now offer the added capability to fine-tune flow to match specific process conditions, reduce variability across chambers and tools, and optimize dose control without system redesign.
Built for uncompromising precision, the ALD7A valve features:
- Enhanced actuator technology for high-speed and repeatable actuation—capable of an actuation speed of less than 3 ms and a response time of approximately 5 ms
- Flow coefficient up to 0.7 Cv with optional custom flow coefficients available
- Field flow adjustability may allow up to a 25% decrease of Cv from factory flow set
- Corrosion resistant valve body comprised of 316L VIM-VAR stainless steel for ultrahigh-purity applications
- Immersible standard valve body from 32°F (0°C) to 392°F (200°C); optional high-temperature body and actuator immersible from 32°F (0°C) to 302°F (150°C)
ALD7A Valve Specifications
| Working Pressure | Vacuum to 145 psig (10.0 bar) |
| Burst Pressure | >3200 psig (220 bar) |
| Actuation Pressure | 60 to 120 psig (4.2 to 8.2 bar) |
| Temperature Rating | 32°F (0°C) to 392°F (200°C) |
| Flow Coefficient | Standard 0.7 Cv (factory set) |
| Body Materials | 316L VIM-VAR stainless steel |
| Diaphragm Material | Cobalt-based superalloy |
| End Connections | Type: VCR® fittings, tube butt weld, 1.5 in. modular surface-mount high flow C-seal |
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ALD7A Series Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
原子层沉积 (ALD) 隔膜阀，高速执行下的超高循环寿命 ，Cv 0.27 到 0.62，耐热执行器, 耐温高达 200°C（392°F），电子执行器位置传感选购件，合采用 316L VIM-VAR 不锈钢阀体的超高纯应用场合，VCR®, 卡套管对焊和模块化表面安装端接
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