Swagelok^® Pressure Gauges, Ultrahigh-Purity and Clean Dry Air (PGU and PGC Series)

Swagelok^® ultrahigh-purity and clean dry air pressure gauges use a Bourdon tube to reliably monitor positive system pressure and vacuum.

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Swagelok^® PGU series ultrahigh-purity pressure gauges and Swagelok^® PGC series clean dry air pressure gauges are designed for use in a wide range of applications, from bulk gas distribution to process tool applications. Their accuracy is in accordance with ASME B40.1, EN837-1, and JIS B7505.

PGU series gauges are ultrahigh-purity (UHP) “clean” for semiconductor gas applications in accordance with SEMI/SEMATECH, are cleaned and packaged in a class 100/10 cleanroom, and have 316L VAR end connections. PGC series gauges are assembled, cleaned, and packaged in a class 100 cleanroom and have 1/4 in. NPT end connections. Both series are purged with nitrogen and include protective cap over threaded connection. Every ultrahigh-purity and clean dry air gauge is 100% factory calibrated and helium leak tested to a maximum rate of 1× 10-9 std cm³/s.

Specifications

Dial Ranges	PGU series: Vacuum to 3000 psi; 200 bar; 21 MPa PGC series: Vacuum to 6000 psi; 400 bar; 40 MPa
Dial Sizes	28, 40, and 50 mm (1, 1 1/2, and 2 in.)
Accuracy	50 mm (2 in.), ± 2% / 1% / 2% of span (ASME B40.1, Grade A, EN 837-1 Class 2.5, JIS B7505 Class 2.5) 40 mm (1 1/2 in.), ± 3% / 2% / 3% of span (ASME B40.1, Grade B, EN 837-1 Class 4, JIS B7505 Class 4) 28 mm (1 in.), ± 3% of span
Temperature Range	Ambient: –40 to 140°F (–40 to 60°C) Media: –40 to 212°F (–40 to 100°C)
End Connections	PGU series: 1/4 in. female VCR^® fitting, 1/4 in. rotatable male VCR fitting, 1/4 in. integral male VCR fitting, 1 1/2 in. flow-through surface-mount PGC series: 1/4 in. male NPT fitting