Swagelok® Ultrahigh-Purity Fluoropolymer Diaphragm Valves (DRP Series)
Swagelok DRP series ultrahigh-purity (UHP) fluoropolymer diaphragm valves offer a strong solution for UHP chemical distribution, deionized (DI) water, and bulk chemical delivery systems.
Request Additional Details世伟洛克® DRP 系列阀门采用改性 PTFE 润湿部件设计,具有优异的耐化学性。获得专利的流体流道可减少流体截留,从而实现工艺流体的快速冲洗并尽可能地降低污染风险。这种设计还能限制流体剪切力,防止浆料结块,提高工艺效率。
改性 PTFE 隔膜经过优化,具有耐用性和较长的循环寿命,其专利形状可减少运行过程中的应力。加强型隔膜边缘可密封阀腔,防止工艺流体污染并减少阀座应变。
DRP 系列隔膜阀可提供气动或手动执行,以及可调节流量和旁通选项,以实现精确控制。它们符合 SEMI 标准 F57-0301,非常适合超高纯 (UHP) 应用,如化学机械抛光 (CMP) 浆料系统、去离子水系统和散装化学品输送系统。
规格
| 压力额定值 | 最高 100 psig (6.8 bar) |
| 介质温度 | 73° 至 212°F(23° 至 100°C) |
| 流量系数 | 最高 10.2 |
| 阀体、隔膜材料 | 改进型PTFE |
| 端接 | 类型:细螺纹扩口和 Nippon Pillar Super 300® 标准 尺寸:1/4 至 1 1/4 in. 和 6 至 25 mm 配置:二通和三通手动和气动关闭;可调流量和旁通型号 |
是否想要使用 DRP 系列阀门优化您的超高纯流体系统?
UHP 含氟聚合物隔膜阀目录
查找详细的产品信息,包括结构材料、额定压力和温度、选购件及配件。
Features: Pneumatic and quarter-turn manual 2-way and 3-way models; pneumatic and manual models with adjustable flow and bypass features; DuPont® Teflon® modified PTFE wetted parts and polypropylene actuator; Meet SEMI Standard F57-0301 for ultrahigh-purity system components; Fine thread flare and Nippon Pillar® Super 300 end connections standard; space saver and other end connections available; Custom manifolds and subassemblies available
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