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隔膜密封阀

世伟洛克® 超高纯含氟聚合隔膜阀(DRP 系列)

世伟洛克 DRP 系列超高纯 (UHP) 含氟聚合物隔膜阀为 UHP 化学品分配、去离子 (DI) 水和散装化学品输送系统提供了强大的解决方案。

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Swagelok® DRP series valves are designed with modified PTFE wetted parts for superior chemical resistance. A patented fluid flow path reduces fluid entrapment, allowing for quick purging of process fluids and minimizing the risk of contamination. The design also limits fluid shear, preventing slurry agglomeration and improving process efficiency.

The modified PTFE diaphragm is optimized for durability and long cycle life, with a patented shape that reduces stress during operation. A reinforced diaphragm rim seals the valve cavity, preventing process fluid contamination and reducing seat strain.

DRP series diaphragm valves are available with either pneumatic or manual actuation and adjustable flow and bypass options for precise control. They meet SEMI Standard F57-0301, making them perfect for ultrahigh-purity (UHP) applications like chemical mechanical planarization (CMP) slurry systems, DI water systems, and bulk chemical delivery systems.

Specifications

Pressure Rating Up to 100 psig (6.8 bar)
Media Temperature 73° to 212°F (23° to 100°C)
Flow Coefficient Up to 10.2
Body, Diaphragm Material Modified PTFE
End Connections Type: Fine thread flare and Nippon Pillar Super 300® standard
Size: 1/4 to 1 1/4 in. and 6 to 25 mm
Configuration: two- and three-way manual and pneumatic shutoff; adjustable flow and bypass models

Want to optimize your ultrahigh-purity fluid system with the DRP series valve?

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UHP Fluoropolymer Diaphragm Valves Catalogs

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