text.skipToContent text.skipToNavigation
超高純度用ダイヤフラム・バルブ、ALD3/ALD6シリーズ

Swagelok® Ultrahigh-Purity Diaphragm Valves (ALD3 and ALD6 Series)

The Swagelok ALD3 and ALD6 series diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, allowing semiconductor manufacturers to achieve the controlled dosing needed for atomic layer deposition (ALD) semiconductor manufacturing.

Request More Information

Ultrahigh-purity ALD3 and ALD6 valves are designed to provide semiconductor manufacturers with dependable, high-speed dosing of precursor gases used to build up microchips layer by layer in deposition chambers. These high-performance ultrahigh-purity valves feature:

  • Ultrahigh cycle life with high-speed actuation
  • Flow coefficients ranging from 0.27 to 0.62, with custom flow coefficients available
  • Full immersibility up to 392°F (200°C) with optional thermal actuators
  • Suitability for ultrahigh-purity applications with standard 316L VIM-VAR stainless steel valve bodies
  • Modular surface-mount, tube butt weld, and Swagelok VCR® end connections
  • Electronic or optical actuator position-sensing option

ALD3 and ALD6 diaphragms are composed of a cobalt-based superalloy material that provides strength and corrosion resistance; their valve bodies are composed of 316L VIM-VAR stainless steel, making them suitable for ultrahigh-purity applications; and the valve seats are composed of fully fluorinated high-purity PFA to enable a broad range of chemical compatibility and excellent resistance to swelling and contamination.

Ultrahigh-purity ALD3 and ALD6 valves can be set up for normally closed and normally open pneumatic actuation, and they are available in a variety of configurations, including two-port straight and elbow designs; two-, three-, and four-port multiport valves and multivalve manifolds; and two- and three-port modular surface mount valves in 1.125 in. (ALD3 series only) and 1.5 in. platforms. Available thermal actuators, position sensors, solenoids, and optional body holes to accommodate heater cartridges can all provide additional value to a user depending on their specific processes.

Specifications

Working PressureVacuum to 145 psig (10.0 bar)
Burst Pressure>3200 psig (220 bar)
Actuation Pressure50 to 90 psig (3.5 to 6.2 bar)
Temperature32° to 392°F (0° to 200°C)
Flow Coefficient (Cv)0.27 or 0.62
Body Materials316L VIM-VAR stainless steel
Diaphragm MaterialCobalt-based superalloy
End Connections
Type (Size)Female VCR® face seal fitting (1/4 in. to 1/2 in.)
Male VCR face seal fitting (1/4 in. to 1/2 in.)
Modular surface mount high-flow C-seal (1.125 in. to 1.5 in.)

ALD3 and ALD6 Series Valves Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

スウェージロックの流体システム部品には、半導体製造環境での耐久性を考慮した材料を使用しているものもあります。

Improve Semiconductor Yield with Optimized Alloys

Discover how semiconductor fabricators can improve end-to-end production yields and improve long-term profitability by selecting the right metals for critical fluid system components.

Learn About Material Selection

Swagelok Resources Curated for You

半導体業界向けの超高純度用(UHP)ALD20バルブのクリーンルームでの組み立て
One New Valve: Three Reasons It Could Change Semiconductor Manufacturing

Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.

40年近く半導体業界のサプライ・チェーンに身を置いてきたカール・ホワイト氏に、自身の経験を基に、半導体業界の進歩の過去、現在、将来について伺いました。
Q&A: Semiconductor Manufacturing Past, Present, and Future

Find out how collaboration between semiconductor tool OEMs, microchip manufacturers, and fluid system solutions providers has enabled the semiconductor market to keep up with the demands of Moore’s Law for decades, and where we go from here.

ローゼンダール・ネクストロム社、スウェージロックとの協業を通じて業務効率の最大化を実現
Fiber Optics Equipment Manufacturer Increases Efficiency with Customized Solutions

Since the 1980s, Rosendahl Nextrom has depended on Swagelok to move its business forward. Learn more about the solutions that allowed the company to outpace its competitors and remain an industry leader.

フィンランドの希釈冷凍機メーカーであるブルーフォース社は、流体システム部品やソリューションに関して、スウェージロックに信頼を寄せています。
Reliable Fluid System Solutions for the Scientific Frontier

Learn why Finnish dilution refrigerator manufacturer Bluefors trusts Swagelok for fluid system components and solutions that help enable quantum computing, experimental physics, and more.