用于原子层沉积工艺的世伟洛克®超高纯隔膜阀（ALD3 和 ALD6 系列）
世伟洛克 ALD3 和 ALD6 系列隔膜阀用于半导体制造设备，以实现原子层沉积 (ALD) 处理所需的可控计量。它们具有超高循环寿命、快速驱动和高达 0.62 的流量系数。
索取 ALD 阀门信息Ultrahigh-purity Swagelok® ALD3 and Swagelok® ALD6 diaphragm valves are designed to provide semiconductor manufacturers with dependable, high-speed dosing of precursor gases used to build up microchips layer by layer in deposition chambers. These high-performance ultrahigh-purity valves feature an ultrahigh cycle life, full immersibility at elevated temperatures, and suitability for ultrahigh-purity applications.
The diaphragms used in ALD3 and ALD6 valves are composed of a cobalt-based superalloy material that provides strength and corrosion resistance. Their valve bodies are 316L VIM-VAR stainless steel, making them suitable for ultrahigh-purity applications. The valve seats are made of fluorinated high-purity PFA to enable a broad range of chemical compatibility and resistance to swelling and contamination. These valves can be set up for normally closed and normally open pneumatic actuation, and they are available in a variety of configurations to suit different installation requirements.
See How ALD Valves Improve Semiconductor Manufacturing
ALD3 and ALD6 Valve Specifications
| Working Pressure | Vacuum to 145 psig (10.0 bar) |
| Burst Pressure | >3200 psig (220 bar) |
| Actuation Pressure | 50 to 90 psig (3.5 to 6.2 bar) |
| Temperature | 32° to 392°F (0° to 200°C) |
| Flow Coefficient (Cv) | 0.27 or 0.62 |
| Body Materials | 316L VIM-VAR stainless steel |
| Diaphragm Material | Cobalt-based superalloy |
| End Connections | Type (Size): Female VCR® face seal fitting (1/4 in. to 1/2 in.), male VCR face seal fitting (1/4 in. to 1/2 in.), modular surface mount high-flow C-seal (1.125 in. to 1.5 in.) |
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ALD3 and ALD6 Series Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
ALD3, ALD6, and ALD7 Diaphragm Valves and ALD20 Bellows: Ultrahigh cycle life, high-speed actuation; Up to 392°F (200°C) w thermal actuators; Electronic actuator position-sensing; ultrahigh-purity applications; High flow capacity, PFA seat, Normally closed pneumatic actuation, Alloy 22 available
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