
世伟洛克® PGU 系列超高纯压力表和世伟洛克® PGC 系列清洁干燥空气压力表设计用于广泛的应用场合,从大宗气体分配到工艺工具应用。其精度符合 ASME B40.1、EN837-1 和 JIS B7505 标准。
PGU 系列压力表为超高纯 (UHP)“洁净”,用于符合 SEMI/SEMATECH 标准的半导体气体应用,在 100/10 级洁净室中进行清洁和包装,具有 316L VAR 端接。PGC 系列压力表在 100 级清洁室中组装、清洁和包装,具有 1/4 in. NPT 端接。这两个系列均采用氮气吹扫,并在螺纹连接处加装保护帽。每个超高纯和清洁干燥空气压力表都经过 100% 的出厂校准和氦气泄漏测试,最大速率为 1× 10-9 std cm3/s。
规格
度盘量程 | PGU 系列:真空至 3000 psi;200 bar;21 MPa PGC 系列:真空至 6000 psi;400 bar;40 MPa |
度盘尺寸 | 28、40 和 50 mm(1、1 1/2 和 2 in.) |
精度 |
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温度范围 | 环境:–40 to 140°F(–40 至 60°C) 介质:–40 至 212°F(–40 至 100°C) |
端接 | PGU 系列:1/4 in. 内螺纹 VCR® 接头、1/4 in. 可旋转外螺纹 VCR 接头、1/4 in. 整体式外螺纹 VCR 接头、1 1/2 in. 流通式表面安装 PGC 系列:1/4 in. 外螺纹 NPT 接头 |
压力表目录
查找详细的产品信息,包括结构材料、额定压力和温度、选购件及配件。
Features: 50 mm (1 1/2 and 2 in.) dial sizes; Accuracy in accordance with ASME B40.100; 316L VAR end connections (PGU series); Center-back and lower mount configurations

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