Swagelok® Thermal-Immersion Diaphragm Valves (DH Series)
Swagelok DH series thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance in high-temperature processes.
Request More InformationSwagelok® DH series thermal-immersion diaphragm valves are designed for applications where the valve needs to be entirely contained within a high-temperature, high-purity environment such as atomic layer deposition (ALD) and precursor delivery applications. These valves have a fully contained high-purity PFA seat that provides compatibility with a broad range of chemicals and excellent resistance to swelling and contamination. The fully swept flow path in the body minimizes entrapment areas and maximizes flow capacity.
Flow coefficients up to 0.60, a variety of 1/4 and 3/8 in. end connections, and pneumatically and manually actuated models are available to meet a wide range of system needs. The “normally closed” is actuator capable of a valve opening or closing time of less than 5 ms, and the valve is designed for optimal performance at 220°C (428°F).
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Thermal-Immersion Diaphragm Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance at 220 degrees C (428 degrees F) for high-temperature processes.
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1つの新しいバルブが半導体製造を変える3つの理由
今回は、原子層蒸着（ALD）バルブの最新テクノロジーが、ハイテク半導体メーカーにもたらす影響について紹介します。