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Diaphragm-Sealed Valve

Swagelok® Diaphragm-Sealed Valves

Swagelok diaphragm-sealed valves improve system efficiency while providing effective flow shutoff by minimizing entrapment areas and facilitating purging with a fully swept flow path. They have long cycle lives and are available in a variety of sizes, materials, and configurations to meet the system requirements of high-purity and ultrahigh-purity (UHP) applications.

View Diaphragm Valves

Swagelok diaphragm-sealed valves come in various sizes, materials, and configurations to meet the needs of high-purity and UHP applications. They feature flow coefficients ranging from 0.20 to 13. Their fully swept flow paths and corrosion-resistant construction make them ideal for applications where cleanliness is crucial. Users can choose from manual, pneumatic, and locking actuator options.

Swagelok diaphragm-sealed valves can be used in atomic layer deposition (ALD), high-flow, modular gas system, thermal-immersion, and ultrahigh-purity applications requiring fluoropolymer component construction.

  • Swagelok springless diaphragm valves for modular gas systems are easy to install, provide a visual indication of flow direction, and have a seat design that improves thermal stability
  • Swagelok bulk gas diaphragm valves offer a combination of strength, flexibility, and cycle life to support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications
  • Swagelok thermal-immersion diaphragm valves can be entirely contained within a high-temperature, high-purity environment, making them strong options for ALD and precursor delivery applications
  • Swagelok ultrahigh-purity fluoropolymer diaphragm valves offer a strong solution for UHP chemical distribution, DI water, and bulk chemical delivery systems

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类别

备件和附件

备件和附件

浏览优质阀门维护元件,了解隔膜密封阀备件和附件,包括隔膜和密封成套件、阀杆成套件和执行机构成套件。

多阀阀组

多阀阀组

查找带隔膜密封阀的多阀阀组。这些阀组专为实现可靠性能而设计,可提供高纯度和精确的流体控制。

大宗气体隔膜阀,LD 系列

大宗气体隔膜阀,LD 系列

大流量应用大宗气体分配隔膜阀,专为满足超高纯关断、大宗气体分配和隔离应用需求而设计。

模块化气体系统用无弹簧隔膜阀,1.125 in,DE 系列

模块化气体系统用无弹簧隔膜阀,1.125 in,DE 系列

可靠的增强型控制阀采用无弹簧设计,是模块化气体系统高效运行的理想之选。

热浸没型隔膜阀,DH 系列

热浸没型隔膜阀,DH 系列

热浸式隔膜阀用于高温工艺,如原子层沉积 (ALD) 和前驱体输送应用。

超高纯度关断隔膜阀,DP 系列

超高纯度关断隔膜阀,DP 系列

查看超高纯关断隔膜阀,可配备直通型、手动执行、多孔口和集成执行机构的模块化表面安装 (MSM)。

超高纯度含氟聚合隔膜阀,DRP 系列

超高纯度含氟聚合隔膜阀,DRP 系列

使用全扫流道可尽可能地减少应力和流体污染,从而确保在 UHP 化学系统中的优良性能和使用寿命。

超高纯度高压隔膜阀,DPH 系列

超高纯度高压隔膜阀,DPH 系列

超高纯、高压隔膜阀提供各种尺寸、材料和配置,适用于各种应用。

超高纯度高流量隔膜阀,DF 系列

超高纯度高流量隔膜阀,DF 系列

使用大流量、无弹簧隔膜阀延长循环寿命。无弹簧或螺纹提高了清洁度,全扫流道增强了吹扫效果。

高纯度高压隔膜阀,DL 和 DS 系列

高纯度高压隔膜阀,DL 和 DS 系列

了解具有重复关断功能,带全封闭软座阀杆头、标准底部和面板安装功能的高纯高压隔膜阀。

Diaphragm-Sealed Valves Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

Swagelok flow coefficient (C<sub>v</sub>) calculator for valves

Calculate Flow Rate for the Right Valve Selection

Use our valve flow coefficient (Cv) calculator to chose a valve sized correctly for your needs.

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Swagelok Resources Curated for You

Valve selection for  fluid sampling systems
How to Select the Right Valves for Your Industrial Fluid System

Learn how to apply the practical STAMPED method to select the valves most suited to your industrial fluid or sampling system design applications.

Reducing fugitive emissions in the chemical and refining industries
Minimize the Costs of Fugitive Emissions with Low-E Valves

Fugitive emissions are a growing concern in the chemical and petroleum refining industry. Certified low-emissions (Low-E) valves can protect your facility and bottom line. Learn what they are, how they are tested, and how they can help you in this post.

Block valves in an industrial fluid system
How to Isolate Industrial Fluid Systems with Block Valves

The isolation of industrial fluid system lines prior to maintenance is vital to plant safety. One of the safest ways to isolate a fluid system line is to install two block valves. Learn how to design proper configurations for your system.

应用于半导体行业的世伟洛克 ALD20 UHP 阀的无尘室组件。
一种全新的阀门。该阀可能改变半导体制造的三大原因

了解原子层沉积 (ALD) 阀门技术的创新如何改变高科技半导体制造商的游戏规则。

DP 系列无弹簧隔膜阀

隔膜密封阀

我们的隔膜密封阀具有多种尺寸、材料和配置,可满足流量系数从 0.20 至 13 以及工作压力高达 3500 psig (241 bar) 的高纯和超高纯 UHP) 应用的需求。

隔膜密封阀可有效关断您的系统流量,并拥有较长的循环寿命。世伟洛克的隔膜密封阀产品包括原子层沉积 (ALD) 隔膜密封阀、适合高流量、高性能和模块化气体系统的无弹簧隔膜密封阀、热浸没型无弹簧隔膜密封阀以及超高纯含氟聚合物隔膜密封阀。提供手动、气动和锁定执行机构选购件。

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