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Swagelokバルク・ガス供給用ダイヤフラム・バルブ LDシリーズ

Swagelok® Bulk-Gas Diaphragm Valves (LD Series)

LD series bulk gas diaphragm valves offer a combination of strength, flexiblity, and cycle life to support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications.

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LD series diaphragm valves have a welded diaghragm construction using three diaphragms welded to the stem to prevent leakage. No use of springs or threads in wetted areas enable cleaner operation, and a unique stem tip design promotes leak-tight shutoff. Flow coefficients up to 13 and a variety of body materials and configurations are available to meet a range of design specifications.


Working PressureUp to 300 psig (20.6 bar)
Temperature–20° to 300°F (–28° to 148°C)
Flow CoefficientUp to 13
Body MaterialsCF3M cast stainless steel, forged and bar stock 316L stainless steel
Diaphragm Material316L stainless steel
End Connections
TypeSwagelok® tube fitting, male VCR® face seal fitting, female NPT, female ISO, tube extension
Size 1/4 to 1 in.; 12 to 25 mm

LD Series Bulk-Gas Diaphragm Valves Catalogs

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Find out how collaboration between semiconductor tool OEMs, microchip manufacturers, and fluid system solutions providers has enabled the semiconductor market to keep up with the demands of Moore’s Law for decades, and where we go from here.